THE ACTIVATION-ENERGY FOR DIAMOND GROWTH FROM CCL4 H-2 MIXTURES IN A HOT-FILAMENT REACTOR/

In this paper we present the measurement of the activation energy for diamond chemical vapor deposition from carbon tetrachloride mixtures i n a hot-filament assisted reactor. Mixtures of 1 vol% CCl4 in H-2 have been used in most experiments. Growth rates have been measured in the temperature range from 220 to 820 degrees C to obtain the activation energy. Raman spectroscopy and scanning electron microscopy show that crystalline diamond was obtained only for substrate temperatures over 420 degrees C. We also present an extensive comparison with most activ ation energy determinations in the literature and propose that there i s a common trend in most observations. (C) 1997 Elsevier Science S.A.