Viscosity of various types of vitreous silica was measured by a cantil
ever-beam-bending method having been used in industry. The viscosity m
easured by this method agreed with the value measured by a standard be
am-bending method for the same sample, and temperature dependence of v
iscosity are consistent with those reported in literature using variou
s measurement methods. OH content dependence of the viscosity at 1200
degrees C was measured. There are two groups of vitreous silica, each
of which can be represented the viscosity by a decreasing function of
OH content; one group is fused quartz (FQ) produced by melting natural
quartz powder, and another group is synthetic fused silica (SFS) prod
uced by flame hydrolysis of SiCl4. The viscosity of FQ is higher than
that of SFS at the same OH content.