Highly conductive metallic oxide thin films of SrRuO3 with single crys
talline quality have been grown on (001) SrTiO3 by using pulsed laser
deposition. The films have a [001] orientation with an in-plane relati
onship of [110](SrRuo3)//[100](SrTiO3). They have excellent metallic b
ehavior with room temperature resistivity of similar to 310 mu Omega c
m and a residual resistance ratio of about 7 at 4.2 K, the largest rep
orted to date. A clear ferromagnetic transition at similar to 147 K wa
s detected by resistivity and magnetic measurements. However, the tran
sition becomes blurred as the density-of-point defects increases in th
e films following a 400 keV proton irradiation with an accumulative do
se up to similar to 6.0 X 10(16) ions/cm(2). (C) 1997 American Institu
te of Physics.