ISOTOPE SPUTTERING OF MOLYBDENUM

Atomic collision processes can be studied with much better statistics by the use of modern parallel computers. Preferential sputtering of na tural molybdenum with seven isotopes as a model target is investigated with the BCA program TRIM.SP. For argon bombardment the dependence of the sputter yield on the incident energy is investigated in the energ y range from 50 eV to 20 keV and on the angle of incidence. The influe nce of the projectile mass is investigated for helium, neon, argon, kr ypton, xenon, and radon at 100 eV and normal incidence. As a measure f or the preferential sputtering the fractionation is determined for the sputtering yield, the sputtered energy, energy and angular distributi ons of sputtered atoms. The strong influence of primary knock-on atoms on the value of the fractionation is discussed. In addition, the dyna mic behaviour of the system is studied with the BCA program TRIDYN.