I. Koponen et al., SIMULATIONS OF SELF-AFFINE ROUGHENING AND RIPPLE FORMATION ON ION-BOMBARDED AMORPHOUS-CARBON SURFACES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 129(3), 1997, pp. 349-355
Sputtering roughening and ripple formation on amorphous carbon surface
s bombarded by 2, 5 and 10 keV Ar- and Xe-ions are studied by using Mo
nte Carlo simulations, where sputtering is treated in detail by simula
ting the entire collision cascades and the surface relaxation is descr
ibed by a Wolf-Villain-type model. The simulations show that bombarded
surfaces have self-affine topography on a scale comparable to the cas
cade dimension, and on larger scales ripples are formed on the surface
. In case of the Ar-ion bombardment the wavelength of the ripples depe
nd on the magnitude of the diffusion and on the orientation of the bea
m as predicted by the continuum theories. In case of the Xe-ion bombar
dment ripples with well-defined wavelengths were found only at an angl
e of incidence 60 degrees. In all cases the ripple wavelength was foun
d to increase with the increasing bombarding energy.