We report on a comprehensive study of the growth of 5-nm-thick epitaxi
al Fe(001) films on Ag(001) substrates which are deposited on Fe-preco
vered GaAs(001) wafers. We characterize the films in situ by scanning
tunneling microscopy, low-energy electron diffraction, X-ray photoelec
tron spectroscopy, and depth profiling to obtain information about the
geometrical and chemical surface structure. We find that the surface
morphology is improved by either growing or postannealing the films at
elevated temperatures. During deposition at and above room temperatur
e, however, an atomic exchange process is activated that results in a
thin Ag film (up to 1 ML) ''floating'' on top of the growing Fe film.
We propose and confirm a growth procedure that yields clean, Ag-free s
urfaces with a morphology superior to the other films. This optimized
recipe consists of two steps: (i) low-temperature growth of the first
2 nm in order to form a diffusion barrier for the Ag substrate atoms,
and (ii) high-temperature deposition of the final 3 nm to take advanta
ge of the improved homoepitaxial growth quality of Fe at elevated temp
eratures. The relevance of these results with respect to magnetic prop
erties of multilayers is discussed.