Electron and ion beam lithographic techniques were used to pattern sel
f-assembled monolayers with organic functional groups. Nucleation and
growth of minerals from aqueous solution were confined to the patterne
d regions. A vinyl-terminated self-assembled monolayer (SAM) was selec
tively deposited in ion and electron beam etched regions of a methyl-t
erminated SAM. Sulfonation of the vinyl groups produced a surface patt
erned in either hydrophobic methyl groups or hydrophilic sulfonate gro
ups. Subsequent growth of FeOOH films was confined to the sulfonated r
egions. Condensation images were used to image each step in the lithog
raphic scheme. Resolution of the SAM patterning step was 1-3 mum, whil
e resolution of the mineral deposition step was 10-15 mum.