Ip. Ipatova et al., ON THE EQUILIBRIUM DISTRIBUTION OF BORON BETWEEN THE SURFACE AND BULKOF THE SILICON CRYSTAL, PHYSICS OF LOW-DIMENSIONAL STRUCTURES, 3-4, 1997, pp. 81-86
The temperature dependent contribution of the silicon lattice vibratio
ns to the distribution coefficient of boron in the system silicon crys
tal + boron surface phase is calculated. The realistic model of lattic
e vibration of silicon is used. The effect of boron localized vibratio
ns is taken into account. It is shown that the localized vibrations im
pede the penetration of the boron atoms into the interior of the cryst
al.