B. Maisenholder et al., A GAAS ALGAAS-BASED REFRACTOMETER PLATFORM FOR INTEGRATED OPTICAL SENSING APPLICATIONS/, Sensors and actuators. B, Chemical, 39(1-3), 1997, pp. 324-329
We present a new type of integrated optical refractometer, based on a
Mach-Zehnder interferometer using III-V semiconductor and TiO2 on SiO2
waveguides. We report on the design, optimized for high sensitivity i
n immunoassay sensing applications, and the fabrication of this sensor
chip. Using a test liquid system of ethanol in water, we demonstrate
a refractive-index resolution of 1 X 10(-5) for this refractometer. Th
is device is a basic building block of a novel, monolithically integra
ted optical sensing circuit, which can be used for example in chemical
or immunological sensing applications.