THE RADICAL TRANSPORT IN THE NARROW-GAP-REACTIVE-ION ETCHER IN SF6 BYTHE RELAXATION CONTINUUM MODEL

We have established a selfconsistent modeling of a narrow-gap reactive ion etcher (N-gap-RIE) with parallel-plate geometry in SF6. Using the discharge structure of the relaxation continuum model, we have numeri cally predicted the radical transport to the surface of N-gap-RIE in S F6 under two different surface reactions. The spatiotemporal profiles of radicals and neutrals are demonstrated for a long time scale (0-1 s ) at between 0.05 Torr and 1.0 Torr at 13.56 MHz. The estimated etch r ate of Si wafer with F radicals agrees reasonably well with the previo us experimental value obtained under a low-power condition. It is stre ssed from the present result that the ion-molecule reactions for the g eneration of F radicals as well as the electron impact dissociation of SF6 are of great importance.