OPTICAL-CONSTANTS OF FLOAT GLASS, NICKEL, AND CARBON FROM SOFT-X-RAY REFLECTIVITY MEASUREMENTS

Angular-dependent reflectivity was measured with a dynamic range of 5- 6 orders of magnitude at similar to 20 different photon energies in th e range from 40 to 800 eV with the HASYLAB reflectometer with synchrot ron radiation. Several float-glass substrates and a number of sputtere d Ni and G films were investigated to improve the accuracy. The optica l constants mere obtained from least-squares fits of theoretical refle ctivity curves, taking into account the influence of film thicknesses and surface and interface roughnesses. All samples with Ni and C films were produced on float-glass substrates, with Ar as the sputter gas, in the low-pressure triode-assisted sputtering facility of the Sincrot rone Trieste. (C) 1997 Optical Society of America.