LOCAL PROBING INSTRUMENTATION AT ADVANCED TECHNOLOGIES CENTER - SURFACE AND FORCE DEVICES WITH TUNNELING SENSOR

Authors
MOISEEV YN PANOV VI SAVINOV SV PYAMINSKY IV
Citation
Yn. Moiseev et al., LOCAL PROBING INSTRUMENTATION AT ADVANCED TECHNOLOGIES CENTER - SURFACE AND FORCE DEVICES WITH TUNNELING SENSOR, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 1690-1693
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
3
Year of publication
1994
Pages
1690 - 1693
Database
ISI
SICI code
1071-1023(1994)12:3<1690:LPIAAT>2.0.ZU;2-N
Abstract
Force and surface devices with tunneling sensor-scanning tunneling and atomic force microscopes-are constructed. Thermal drift, seismic and electronic noise are eliminated in precise experiments. The tunneling sensor is proved to be advantageous for large scale images and force v ersus distance measurements with high dynamic range and subnanometer r esolution. The influence of adsorbate on scanning tunneling microscope (STM) images of graphite is demonstrated. The holes 2 nm in diameter are produced on graphite exposed at air using STM.