A. Cozma et R. Puers, ELECTROSTATIC ACTUATION AS A SELF-TESTING METHOD FOR SILICON PRESSURESENSORS, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 32-36
The aim of this work is to investigate the possibility of using electr
ostatic forces to actuate the membrane of a pressure sensor in order t
o create self-testing features in the system. It is shown that the ele
ctrostatic pressure is small compared with the external pressure, unle
ss large voltages or electrical charges are used. The interrelation be
tween electrostatic forces and externally applied pressure is calculat
ed for different electrical drive modes of the capacitor, in the case
of a uniform membrane and for a MESA-type membrane.