A NOVEL COMBINED REDUNDANT PRESSURE SENSOR WITH SELF-TEST FUNCTION

Authors
PUERS R DEBRUYKER D COZMA A
Citation
R. Puers et al., A NOVEL COMBINED REDUNDANT PRESSURE SENSOR WITH SELF-TEST FUNCTION, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 68-71
Citations number
4
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
60
Issue
1-3
Year of publication
1997
Pages
68 - 71
Database
ISI
SICI code
0924-4247(1997)60:1-3<68:ANCRPS>2.0.ZU;2-9
Abstract
This paper presents a method to overcome the uncertainty in functional ity of pressure sensors. A novel redundant measurement method is demon strated. Moreover, the feasibility of the first silicon pressure senso r with self-test function is proposed. Both specifications (redundancy and self-test) are integrated in a single device and combine a piezor esistive Wheatstone bridge with a capacitive sensor and a thermopneuma tic actuator, the latter being used as a fail-check of the device.