This paper presents a method to overcome the uncertainty in functional
ity of pressure sensors. A novel redundant measurement method is demon
strated. Moreover, the feasibility of the first silicon pressure senso
r with self-test function is proposed. Both specifications (redundancy
and self-test) are integrated in a single device and combine a piezor
esistive Wheatstone bridge with a capacitive sensor and a thermopneuma
tic actuator, the latter being used as a fail-check of the device.