REFRACTIVE-INDEX MEASUREMENTS USING AN INTEGRATED MACH-ZEHNDER INTERFEROMETER

Authors
SCHUBERT T HAASE N KUCK H GOTTFRIEDGOTTFRIED R
Citation
T. Schubert et al., REFRACTIVE-INDEX MEASUREMENTS USING AN INTEGRATED MACH-ZEHNDER INTERFEROMETER, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 108-112
Citations number
12
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
60
Issue
1-3
Year of publication
1997
Pages
108 - 112
Database
ISI
SICI code
0924-4247(1997)60:1-3<108:RMUAIM>2.0.ZU;2-1
Abstract
In this paper a refractometer system with an integrated optical sensor is presented. The sensitive element is a single or multichannel Mach- Zehnder interferometer (MZI) fabricated on silicon using waveguides ma de from SiO2 and SiON. The refractometer allows for real-time monitori ng of refractive indices of gases and liquids in an index range betwee n 1 and 1.49 using the silicon MZI as a low-cost disposable part.