PYROELECTRIC THIN-FILM SENSOR ARRAY

Pyroelectric thin-film point detectors and 1 x 12 arrays have been fab ricated and characterized. They consist of sol-gel-deposited PZT thin- film elements on micromachined Si3N4/SiO2 membranes. The measured curr ent and voltage response as a function of modulation frequency of a 1 x 12 array element is compared with finite-element calculations. Volta ge responsivities of almost 3000 V W-1 in vacuum and 800 V W-1 in air have been achieved for 0.4 mm x 0.9 mm elements. Some point detectors have been completely packaged and correct operation in a movement dete ction system has been demonstrated.