MODELING AND OPTIMAL-DESIGN OF PIEZOELECTRIC CANTILEVER MICROACTUATORS

Authors
DEVOE DL PISANO AP
Citation
Dl. Devoe et Ap. Pisano, MODELING AND OPTIMAL-DESIGN OF PIEZOELECTRIC CANTILEVER MICROACTUATORS, Journal of microelectromechanical systems, 6(3), 1997, pp. 266-270
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Journal of microelectromechanical systems → ACNP
ISSN journal
10577157
Volume
6
Issue
3
Year of publication
1997
Pages
266 - 270
Database
ISI
SICI code
1057-7157(1997)6:3<266:MAOOPC>2.0.ZU;2-C
Abstract
A novel model is described for predicting the static behavior of a pie zoelectric cantilever actuator with an arbitrary configuration of elas tic and piezoelectric layers, The model is compared to deflection meas urements obtained from 500-mu m-long ZnO cantilever actuators fabricat ed by surface micromachining, Modeled and experimental results demonst rate the utility of the model for optimizing device design, A discussi on of design considerations and optimization of device performance is presented.