The concentration profiles of neodymium, erbium and niobium thermally
diffused into (001) KTiOPO4 single crystals have been investigated by
the Rutherford backscattering spectroscopy. The activation energy E-A,
and the pre-exponential factor, D-0, obtained for Nd, Er and Nb are E
-A,E-Nd = 5.3 eV, D-0,D-Nd = 1.3 x 10(-11) cm(2) s(-1); E-A,E-Er = 6.4
eV, D-0,D-Er = 3.6 x 10(-16) cm(2) s(-1) and E-A,E-Nb = 3.8 eV, D-0,D
-Nb = 1.2 x 10(-14) cm(2) s(-1).