ENERGY-FILTERED RHEED AND REELS FOR IN-SITU REAL-TIME ANALYSIS DURINGFILM GROWTH

Energy-filtered reflection high energy electron diffraction and reflec tion electron energy loss spectroscopy expand the usefulness of reflec tion high energy electron diffraction for quantitative structure deter mination and surface spectroscopy during film growth. Several implemen tations of energy-filtered reflection high energy electron diffraction are discussed, along with the progress and prospects for structure de termination. New developments in parallel detection reflection electro n energy loss spectroscopy (PREELS) enable the use of this method to o btain surface-spectroscopic information in real time during thin film growth, greatly expanding the range of surface information available d uring growth.