A modular electrochemical microanalysis system (ELMAS) has been develo
ped at the Karlsruhe Research Center within the project ''Microsystem
Technology''. This self-calibrating system contains ISFET-microsensors
and gas pumping micro membrane pumps; The transport of liquids is rea
lized by changing the air pressure on the liquid in the storage reserv
oir. The pH-ISFETs show a fast response and with flow rates of 200-300
mu l/min, a cycle time for calibration and sensor measurement of 60 s
can be achieved. With increasing flow rates, the cycle time can be de
creased but the liquid consumption rises because of dispersion. Approx
imately 50 mu l of analyte and a maximum of 70 mu l calibration liquid
is required for one cycle. Because of the gas buffer in the storage r
eservoir the fluid flow is delayed by 5 s compared to the control sign
als of the micropump. (C) 1997 Published by Elsevier Science Ltd.