MICROHARDNESS OF THIN MOLYBDENUM FILMS

Authors
NAVRATIL V SIKOLA T
Citation
V. Navratil et T. Sikola, MICROHARDNESS OF THIN MOLYBDENUM FILMS, Materials science & engineering. A, Structural materials: properties, microstructure and processing, 234, 1997, pp. 390-392
Citations number
7
Categorie Soggetti
Material Science
Journal title
Materials science & engineering. A, Structural materials: properties, microstructure and processing → ACNP
ISSN journal
09215093
Volume
234
Year of publication
1997
Pages
390 - 392
Database
ISI
SICI code
0921-5093(1997)234:<390:MOTMF>2.0.ZU;2-Y
Abstract
The microhardness of thin molybdenum films deposited on monocrystallin e Si substrates was measured using a simple method of the extrapolatio n to a very thick layer. The results obtained give a relatively high v alue for the film hardness. We attempt to explain this by structural c hanges which occur in the course of the complicated growth of the film s. (C) 1997 Elsevier Science S.A.