THE EFFECTS OF MECHANICAL-PROPERTIES OF THIN-FILMS ON NANO-INDENTATION DATA - FINITE-ELEMENT ANALYSIS

Mechanical properties of thin films are commonly determined using nano or ultra-microhardness indentation. Understanding the relationship of the measured data and the mechanical properties of:he indented materi als is of importance in order to obtain reliable mechanical properties , particularly of the thin films. Using finite element analysis, the e ffects of the elastic modulus, yield strength, and strain hardening of the film on indertation data are analysed and discussed for the inden tation with 2, 8, 10 and 50 mu m radius indenters. Elastic modulus of the films on a single ductile substrate shows relatively small influen ce whereas yield strength and strain hardening are found to have signi ficant effect on the measured data. (C) 1997 Published by Elsevier Sci ence B.V.