FIRST USE OF NTD GERMANIUM-BASED MICROCALORIMETERS FOR HIGH-RESOLUTION, BROAD-BAND X-RAY-MICROANALYSIS

Authors
SILVER E LEGROS M AUSTIN G MADDEN N BEEMAN J HALER E
Citation
E. Silver et al., FIRST USE OF NTD GERMANIUM-BASED MICROCALORIMETERS FOR HIGH-RESOLUTION, BROAD-BAND X-RAY-MICROANALYSIS, X-ray spectrometry, 26(5), 1997, pp. 265-268
Citations number
9
Categorie Soggetti
Spectroscopy
Journal title
X-ray spectrometry → ACNP
ISSN journal
00498246
Volume
26
Issue
5
Year of publication
1997
Pages
265 - 268
Database
ISI
SICI code
0049-8246(1997)26:5<265:FUONGM>2.0.ZU;2-H
Abstract
Broadband, high-resolution x-ray spectra from samples excited by the e lectron beam of a scanning electron microscope were obtained with an N TD germanium-based microcalorimeter, An energy resolution of 8 eV was used to resolve completely the silicon K alpha from the tungsten M alp ha x-rays. This performance will make it possible to analyze efficient ly the composition of thin films and surface contaminants by using low electron excitation energies. (C) 1997 by John Wiley & Sons, Ltd.