MODIFICATIONS TO A MULTIPLE-SCATTERING MONTE-CARLO MODEL TO PREDICT X-RAY GENERATION CURVES

Quantitative analysis of homogeneous bulk unknowns using an electron p robe microanalyser requires the accurate knowledge of the depth distri bution of x-ray production [phi(rho z) curves]. Linear behaviour is ob served in the plot of In phi(pz) vs. (rho z)(2) beyond the peak value for most experimentally measured data. However, in phi(rho z) vs. (rho z)(2) plots of Monte Carlo simulated phi(rho z) curves, in general, a re non-linear and concave downwards. By introducing the concept of ele ctron straggling into a multiple scattering Monte Carlo model, agreeme nt with the behaviour of the experimental curves is achieved. (C) 1997 by John Wiley & Sons, Ltd.