As. Drobyshev et Ea. Samyshkin, A SETUP FOR STUDYING RADIATION EMITTED DURING GAS DEPOSITION ON A COLD SUBSTRATE, Instruments and experimental techniques, 40(3), 1997, pp. 437-439
An experimental setup for studying spectral and integrated characteris
tics of spontaneous optical emission accompanying the process of gas d
epositon on a cold substrate is described. The setup enables measureme
nts within temperture and pressure ranges of 10-250 K and 0.01-100 Pa,
respectively. The spectrum and duration of a nitrous oxide radiation
burst were measured.