AN INVESTIGATION OF RANGE DISTRIBUTION PARAMETERS OF IMPLANTED F-19 IONS IN AU, AG AND CU NOBLE-METALS

Depth profiles of fluorine implanted in gold, silver and copper metal have been accurately measured using the F-19(p,alpha gamma)O-16 resona nce nuclear reaction at E-R = 872.1 keV. A proper deconvolution calcul ation method was used to extract the depth profile of fluorine from th e experimental excitation yield curves. The range parameters, R-p,Delt a R-p, and SK obtained in this work were compared with the theoretical calculations. The comparison shows that for all materials studied her e the experimental R-p values are in good agreement with the results o btained by the TRIM96 code, while the experimental range stragglings, Delta R-p, are systematically larger than the TRIM simulation results. (C) 1997 Elsevier Science B.V.