MEASUREMENTS OF POWER ABSORPTION IN A MODIFIED MAGNETRON-TYPE DISCHARGE

The power absorption of a modified magnetron-type discharge that has a cylindrical shaped rf electrode is estimated using two different inde pendent methods. The experiment was carried out for the rf power up to 500 W at a frequency of 13.56 MHz and for the pressure region of 0.5 mTorr to 10 mTorr. This magnetron-type plasma shows a higher power tra nsfer efficiency (eta) around 75% in the pressure region of 0.5 mTorr to 10 mTorr. With an increase of the pressure or applied rf power, the eta tends to drop. For comparison! the eta in the absence of the magn etic field is also estimated and reported. In the absence of the magne tic Geld, the eta of the plasma source drops to about 30% at 2mTorr.