Sputter-deposited magnetostrictive films present a new and interesting
approach to realizing cantilever- and membrane-type actuators or reso
nant sensors in microsystems as they offer features like contactless,
high frequency operation, simple actuator designs and a cost-effective
manufacturing technique. An essential development was the preparation
of low field positive and negative giant magnetostrictive amorphous,
or multilayered thin film materials with magnetostriction exceeding 30
0 ppm at 0.02 T. Using these optimized films, Si-based microsystems (m
icropump, linear ultrasonic motor) have been realized which demonstrat
e the potential of magnetostrictive thin film actuators. (C) 1997 Else
vier Science S.A.