GIANT MAGNETOSTRICTIVE THIN-FILM MATERIALS AND APPLICATIONS

Sputter-deposited magnetostrictive films present a new and interesting approach to realizing cantilever- and membrane-type actuators or reso nant sensors in microsystems as they offer features like contactless, high frequency operation, simple actuator designs and a cost-effective manufacturing technique. An essential development was the preparation of low field positive and negative giant magnetostrictive amorphous, or multilayered thin film materials with magnetostriction exceeding 30 0 ppm at 0.02 T. Using these optimized films, Si-based microsystems (m icropump, linear ultrasonic motor) have been realized which demonstrat e the potential of magnetostrictive thin film actuators. (C) 1997 Else vier Science S.A.