NOVEL METHOD FOR REAL-TIME MONITORING OF NONLINEAR TRANSITION SHIFT

This paper presents a technique for real-time measurement of non-linea r transition shift (NLTS) caused by the adjacent transition. The metho d is based on the harmonic elimination principle. By measuring the rea dout amplitude of three selected harmonics from a specific test patter n, the NLTS can be obtained from the amplitudes of the three selected harmonics. The proposed method has the advantage for real-time measure ment of the NLTS. This is not true for the existing NLTS measurement t echniques. Comparison of the NLTS value measured by the proposed metho d and the existing method shows satisfactory agreement between them. F urthermore, the proposed method has the advantage of insensitivity to the fluctuation of flying height during the reading and testing proces s.