RECORDING STUDIES OF SUBMICRON WRITE HEADS BY FOCUSED ION-BEAM TRIMMING

Citation
Gl. Gorman et al., RECORDING STUDIES OF SUBMICRON WRITE HEADS BY FOCUSED ION-BEAM TRIMMING, IEEE transactions on magnetics, 33(5), 1997, pp. 2824-2826
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied
ISSN journal
00189464
Volume
33
Issue
5
Year of publication
1997
Part
1
Pages
2824 - 2826
Database
ISI
SICI code
0018-9464(1997)33:5<2824:RSOSWH>2.0.ZU;2-L
Abstract
In this paper we discuss the performances of our current inductive wri te heads which have been processed using conventional lithography, the n trimmed at the ABS using focused ion beam to submicron dimensions fo r very narrow track applications. We demonstrate that for pole-tips of submicron geometries, we are able to achieve adequate write performan ces. For a 10 turn FIB trimmed head of 0.85 micron final pole width, w e achieve an erase width of 0.9 microns, 55% rolloff density at 5500 f c/mm, write threshold of 30 mA, and hard transition shift of 5 nm at w rite currents of 70 mA.