A SYSTEMATIC STUDY OF A-CNX OVERCOAT FILM FOR PROXIMITY RECORDING

This paper takes a systematic approach to study the correlation betwee n the film growth processes and mechanical properties of amorphous car bon nitride overcoat films for proximity recording. The film propertie s were characterized by resistivity measurements, Raman spectroscopy, Anger and XPS depth profiling,and high resolution XPS scans of C-1s an d N-1s core level bond energies. Results from these characterization m ethods can be correlated to the sputtering process parameters and the tribological scratch performance of the films.