HIGH COERCIVITY SMFEALC THIN-FILMS FABRICATED BY MULTILAYER SPUTTERING

Citation
Ml. Yan et al., HIGH COERCIVITY SMFEALC THIN-FILMS FABRICATED BY MULTILAYER SPUTTERING, IEEE transactions on magnetics, 33(5), 1997, pp. 3706-3708
Citations number
12
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied
ISSN journal
00189464
Volume
33
Issue
5
Year of publication
1997
Part
2
Pages
3706 - 3708
Database
ISI
SICI code
0018-9464(1997)33:5<3706:HCSTFB>2.0.ZU;2-Z
Abstract
Multilayer sputtering of SmFe/C(Al) plus appropriate thermal processin g has been used to fabricate SmFeC thin films with Al substitution for Fe. It was found that the SmFeAlC thin films exhibited exceptionally high coercivities. A coercivity of 28 kOe was realized for the thin fi lm with structure of Ta(1000 Angstrom)/[SmFe(40 Angstrom)/ C(Al)(5 Ang strom)]x50/Ta(200 Angstrom) with subsequent annealing at 650 degrees C .