Multilayer sputtering of SmFe/C(Al) plus appropriate thermal processin
g has been used to fabricate SmFeC thin films with Al substitution for
Fe. It was found that the SmFeAlC thin films exhibited exceptionally
high coercivities. A coercivity of 28 kOe was realized for the thin fi
lm with structure of Ta(1000 Angstrom)/[SmFe(40 Angstrom)/ C(Al)(5 Ang
strom)]x50/Ta(200 Angstrom) with subsequent annealing at 650 degrees C
.