NiZn ferrite thin Rims with the spinel structure have been deposited s
uccessfully on glass substrates a:, a relatively low temperature by me
ans of the Facing Target Sputtering(PTS) technique, In addition to sub
strate temperature, PO2/P (O-2 partial pressure over fetal sputtering
pressure) ratio was found to be another main factor to control in-plan
e coercivity He and saturation moment density Ms of NiZn ferrite thin
films, The increase of Ms is attributed to the increase of the substra
te temperature or the decrease of PO2/P ratio; the decrease of Hs: is
associated with the increase of both substrate temperature ansi PO2/P
ratio, Il's believed that the PO2/P ratio plays a critical role in the
formation of NiZn ferrite film, which determines the magnetic propert
ies of the film, With the increase of PO2/P ratio, NiZn thin film chan
ges from a strong (111), (311) texture-dominated polycrystal structure
to an amorphous structure and grain size become smaller, In this stud
y, sputtering conditions of NiZn ferrite films were optimized to achie
ve a low in-plane coercivity He and a relatively high saturation momen
t density Ms.