S. Nakagawa et al., IMPROVEMENT OF SOFT-MAGNETIC PROPERTIES OF FERROMAGNETIC FE-CO-TA-N MFILMS MULTILAYERED WITH PARAMAGNETIC TI, CO67CR33 AND FE82CO9TA9-N INTERLAYERS/, IEEE transactions on magnetics, 33(5), 1997, pp. 3805-3807
[Fe-Co-Ta:N/paramagnetic layer] multilayers were deposited using a fac
ing targets sputtering apparatus. Soft magnetic properties were optimi
zed by adjusting the N content in paramagnetic interlayers of Ti, Co67
Cr33Fe82Co9Ta9:N. The addition of a small amount of N atoms into Ti in
terlayer was effective in maintaining relatively high mu(r) even after
annealing at 280 degrees C. Fe82Co9Ta9:N/Ti-N multilayer revealed sof
t magnetic properties before and after annealing process.