The annealing behavior of amorphous terfenol-D thin films is examined
in this work Amorphous thin films were prepared by DC magnetron sputte
r deposition from alloy targets. Differential scanning calorimetry of
these films was performed in the temperature range 100-800 degrees C.
Based on DSC data annealing experiments were performed at 400, 550, 57
5, 600 and 650 degrees C. X-ray diffraction shows RFe2 phase is formed
when samples are annealed at 575-600 degrees C. Other phases observed
are Fe and rare earth oxide.