AN INTEGRATED MICROPERMEAMETER FOR SOFT-MAGNETIC MICROSTRUCTURES MEASUREMENTS

A prototype of integrated micropermeameter has been achieved, using th e batch process on silicon wafers developed for the fabrication of mag netic heads for helical scan recorders, Measuring the inductance of th e integrated solenoids as a function of the frequency gives informatio n on the effective permeability of the magnetic microstructure. This c omponent can be used as a local magnetic material characterization too l, it can also be used as an inductive passive component with possible adjustment of its frequency range by the demagnetizing factor.