SELF-CONSISTENT LOW-PRESSURE RF DISCHARGE MODELING - COMPARISONS WITHEXPERIMENTS IN CLEAN AND DUSTY PLASMAS

Self-consistent fluid and particle-in-cell Monte Carlo (PIC-MC) models have been used to study the electrical characteristics of rf discharg es in clean and dusty plasmas. Numerical results in pure helium and si lane and in dusty argon are compared with experimental measurements. T he presence of large concentration of dust particles in the plasma mod ifies considerably the electrical characteristics of the discharge. Th e discharge impedance becomes much more resistive in presence of dust particles. Depending on the geometry of the reactor the appearance of electrostatic traps for negatively charged particulates has been studi ed with a 2D fluid model.