ULTRATHIN-FILM HARDNESS INVESTIGATIONS BY A MODIFIED ATOMIC-FORCE MICROSCOPE

Citation
G. Persch et al., ULTRATHIN-FILM HARDNESS INVESTIGATIONS BY A MODIFIED ATOMIC-FORCE MICROSCOPE, Applied physics. A, Solids and surfaces, 59(1), 1994, pp. 29-32
Citations number
7
Categorie Soggetti
Physics, Applied
ISSN journal
07217250
Volume
59
Issue
1
Year of publication
1994
Pages
29 - 32
Database
ISI
SICI code
0721-7250(1994)59:1<29:UHIBAM>2.0.ZU;2-Q
Abstract
We have modified an atomic force microscope in order to determine the hardness of ultrathin films (10 nm) typically used in modern magnetic thin-film disk media.