TOPOGRAPHIC CORRECTION OF 3D SIMS IMAGES

In order to provide an accurate rendition of a three-dimensional (3D) volume obtained by SIMS, it is necessary to take account of the topogr aphy of the original surface and the relative sputter rates of the dif ferent structures within the volume, We describe a method that correct s both distortions to 3D SIMS images. An atomic force microscope is us ed to produce a topographic images of the area analysed by SIMS PS, bo th before and after the depth profile, This information is convoluted with the 3D SIMS image to produce a correct 3D image of the changes in composition within the volume of the material. (C) 1997 by John Wiley & Sons, Ltd.