BIAXIAL MODULI OF COHERENT SI1-XGEX FILMS ON SI(001)

Authors
FLORO JA CHASON E LEE SR PETERSEN GA
Citation
Ja. Floro et al., BIAXIAL MODULI OF COHERENT SI1-XGEX FILMS ON SI(001), Applied physics letters, 71(12), 1997, pp. 1694-1696
Citations number
18
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
71
Issue
12
Year of publication
1997
Pages
1694 - 1696
Database
ISI
SICI code
0003-6951(1997)71:12<1694:BMOCSF>2.0.ZU;2-7
Abstract
The biaxial moduli of coherently strained Si1-xGex thin films have bee n determined over the composition range x=0.15-0.6 from independent me asurements of film stress and strain. Our results indicate that use of the rule of mixtures to determine the strained-alloy elastic constant s from the bulk values for pure Si and Ge is valid, and that higher-or der elastic effects are relatively unimportant over this composition r ange. (C) 1997 American Institute of Physics.