LOCAL SURFACE-POTENTIAL MEASUREMENT OF PD GAAS CONTACT AND ANODIZED ALUMINUM FILMS USING SCANNING PROBE MICROSCOPY/

We show that the surface potential measurement using scanning probe mi croscopy can measure potential distributions of a Pd/GaAs contact and absolute values of the potentials on individual anodized aluminum film s, A potential difference was obtained between the Pd film and GaAs su bstrate, which is close to the barrier height of the same Pd/GaAs cont act as estimated from tile conventional current-voltage method, For th e anodized aluminum films, we clarified that the surface potential var ies with surface treatments by measuring absolute values of the potent ial for individual samples.