ADDITIVE FABRICATION OF INTEGRATED FERROELECTRIC THIN-FILM CAPACITORSUSING SELF-ASSEMBLED ORGANIC THIN-FILM TEMPLATES

Authors
JEON NL CLEM P JUNG DY LIN WB GIROLAMI GS PAYNE DA NUZZO RG
Citation
Nl. Jeon et al., ADDITIVE FABRICATION OF INTEGRATED FERROELECTRIC THIN-FILM CAPACITORSUSING SELF-ASSEMBLED ORGANIC THIN-FILM TEMPLATES, Advanced materials, 9(11), 1997, pp. 891
Citations number
31
Categorie Soggetti
Material Science
Journal title
Advanced materials → ACNP
ISSN journal
09359648
Volume
9
Issue
11
Year of publication
1997
Database
ISI
SICI code
0935-9648(1997)9:11<891:AFOIFT>2.0.ZU;2-C
Abstract
The utility of non-lithographic patterning methods for the integrated fabrication of prototypical thin-film-device architectures is demonstr ated. An additive patterning technique based on printed organic thin f ilms is used to fabricate ferroelectric capacitors consisting of a Pt/ PZT/Pt thin-film structure, where PZT is lead zirconium titanate. This type of material, which has applications in high performance informat ion storage, micromachine, and thermal imaging devices, cannot be crea ted using the conventional fine-scale patterning methods.