THE EFFECT OF ADDITIVES ON THE ADSORPTION PROPERTIES OF POROUS SILICON

Authors
OHALLORAN GM KUHL M TRIMP PJ FRENCH PJ
Citation
Gm. Ohalloran et al., THE EFFECT OF ADDITIVES ON THE ADSORPTION PROPERTIES OF POROUS SILICON, Sensors and actuators. A, Physical, 61(1-3), 1997, pp. 415-420
Citations number
35
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
61
Issue
1-3
Year of publication
1997
Pages
415 - 420
Database
ISI
SICI code
0924-4247(1997)61:1-3<415:TEOAOT>2.0.ZU;2-Z
Abstract
Porous silicon is used as a dielectric layer in a capacitive humidity sensor. The addition of a commercial surfactant to the electrolyte dur ing porous silicon formation has been found to affect significantly th e adsorption properties of the layer, resulting in a much increased se nsitivity and response speed. The structure of the formed porous layer is examined and compared with those formed using HF alone and a stand ard surfactant.