This paper proposes a multithreshold CMOS (MTCMOS) circuit that uses S
IMOX process technology. This MTCMOS/SIMOX circuit combines fully depl
eted low-threshold CMOS logic gates and partially depleted high-thresh
old power-switch transistors. The low-threshold CMOS gates have a larg
e noise margin for fluctuations in operating temperature in addition t
o high-speed operation at the low supply voltage of 0.5 V. The high-th
reshold power-su itch transistor in which the body is connected to the
gate through the reverse-diode makes it possible to obtain large chan
nel conductance in the active mode without any increase of the leakage
current in the sleep mode. The effectiveness of the MTCMOS/SIMOX circ
uit is confirmed by an evaluation of a gate-chain test element group (
TEG) and an experimental 0.5-V, 40-MHz, 16-b ALU, which were designed
and fabricated with 0.25-mu m MTCMOS/SIMOX technology.