Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)

Other titles
Microelectronics processing and phenomena
Corp./Body Author
American Vacuum Society.; American Institute of Physics.
Place : Publisher

New York, N.Y. : by the American Institute of Physics for the AVS (©1983-©1990.)

From year - To year
1983-1990
Publication history
2nd ser., v. 1, no. 1 (Jan./Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990).
Type of resource
Periodical
Frequency
Bimonthly
Language
English
Country of publication
United States
ISSN
2327-9877
ISSN-L
0734-211X
Codice Dewey code
621.5/5/05; 621.5/5/05
Medium
On-line (remote)
Journal public access
http://scitation.aip.org/jvst/
Continued in part by
Journal of vacuum science and technology (Online)
Other physical media
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Acnp cumulative hol.
1983-1990.
Journal CNR code
P 00253643
Journal ACNP code
2981625
Permalink
http://acnpsearch.tweb-dev.unibo.it/journal/2981625
Full Text
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