Journal of vacuum science & technology. B, Microelectronics processing and phenomena

Other titles
Journal of vacuum science and technology.; Microelectronics processing and phenomena
Corp./Body Author
American Vacuum Society.; American Institute of Physics.
Place : Publisher

New York, N.Y. : Published for the Society by the American Institute of Physics (1983-©1990.)

From year - To year
1983-1990
Publication history
2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990).
Type of resource
Periodical
Frequency
Bimonthly
Language
English
Country of publication
United States
ISSN
0734-211X
ISSN-L
0734-211X
Codice Dewey code
621.5/5/05
Medium
Printed text
Journal public access
http://scitation.aip.org/jvst/
http://ieeexplore.ieee.org/servlet/opac?punumber=4915583 (Restricted to IEEE Xplore subscribers)
Continued by
Journal of vacuum science & technology. B, Microelectronics and nanometer structures
Continued in part by
Journal of vacuum science & technology
Other physical media
Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
Acnp cumulative hol.
1983-1990.
Journal CNR code
P 00081058
Journal ACNP code
53908
Permalink
http://acnpsearch.tweb-dev.unibo.it/journal/53908
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27
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