Journal of vacuum science & technology

Corp./Body Author
American Vacuum Society;American Institute of Physics
Place : Publisher

Washington : American Institute of Physics

From year - To year
1964-1982
Type of resource
Periodical
Frequency
Bimonthly
Language
English
Country of publication
United States
ISSN
0022-5355
ISSN-L
0022-5355
UDC code
669; 6
Codice Dewey code
621.55/05
Medium
Printed text
Split into
Journal of vacuum science & technology. A. Vacuum, surfaces, and films
Split into
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Other physical media
Journal of vacuum science and technology (Online)
Acnp cumulative hol.
1964-1982.
Journal CNR code
P 00046119
Journal ACNP code
31735
Permalink
http://acnpsearch.tweb-dev.unibo.it/journal/31735
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