Other titles
Journal of vacuum science & technology., International journal devoted to microelectronics and nanometer structures; JVST B; Microelectronics and nanometer structures; Journal of vacuum science and technology., Microelectronics and nanometer structures
Corp./Body Author
American Vacuum Society;American Institute of Physics
Place : Publisher
New York : Published for the Society by the American Institute of Physics
From year - To year
1991-2010
Type of resource
Periodical
Frequency
Bimonthly
Language
English
Country of publication
United States
ISSN
1071-1023
ISSN-L
1071-1023
Codice Dewey code
621.381/05
Journal code
P 00232448
Medium
Printed text
Journal public access
Other physical media
Acnp cumulative hol.
1991-2010.
Libraries
