Journal of vacuum science & technology. B, Microelectronics and nanometer structures

Other titles
JVST B; Microelectronics and nanometer structures
Corp./Body Author
American Vacuum Society.; American Institute of Physics.
Place : Publisher

New York : Published for the Society by the American Institute of Physics (c1991-c2010.)

From year - To year
1991-2010
Publication history
2nd ser., v. 9, no. 1 (Jan./Feb. 1991)-2nd ser., v. 28, no. 1 (Jan./Feb. 2010).
Type of resource
Periodical
Frequency
Bimonthly
Language
English
Country of publication
United States
ISSN
1071-1023
ISSN-L
1071-1023
Codice Dewey code
621.381/05
Medium
Printed text
Journal public access
http://ieeexplore.ieee.org/servlet/opac?punumber=4915583 (Restricted to IEEE Xplore subscribers)
http://scitation.aip.org/jvstb
Continues
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Continued by
Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Print)
Other physical media
Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)
Acnp cumulative hol.
1991-2010.
Journal CNR code
P 00232448
Journal ACNP code
923932
Permalink
http://acnpsearch.tweb-dev.unibo.it/journal/923932
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