ITA
ENG

Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Print)

Corp./Body Author

American Vacuum Society.; American Institute of Physics.

Place : Publisher

New York, NY : AVS through the American Institute of Physics (c2010-)

From year - To year

2010-

Publication history

Began with 2nd ser., v. 28, no. 2 (Mar./Apr. 2010).

Type of resource

Periodical

Frequency

Bimonthly

Language

English

Country of publication

United States

ISSN

2166-2746

ISSN-L

2166-2746

Codice Dewey code

621

Medium

Printed text

Journal public access

http://scitation.aip.org/jvstb
http://ieeexplore.ieee.org/servlet/opac?punumber=4915583

Continues

Other physical media

Acnp cumulative hol.

2010-2015;

Journal CNR code

P 00237781

Journal ACNP code

2865690

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