Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)

Corp./Body Author
American Vacuum Society.; American Institute of Physics.
Place : Publisher

Woodbury, N.Y. : Published for the American Vacuum Society by the American Institute of Physics

From year - To year
1991-2009
Publication history
Ceased in 2009?
Type of resource
Periodical
Frequency
Bimonthly
Language
English
Country of publication
United States
ISSN
1520-8567
ISSN-L
1071-1023
Codice Dewey code
621
Medium
On-line (remote)
Journal public access
http://scitation.aip.org/content/avs/journal/jvstb/browse
http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=4915583
Continued by
Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Online)
Other physical media
Journal of vacuum science & technology. B, Microelectronics and nanometer structures
Acnp cumulative hol.
1983-2009.
Journal CNR code
P 00232447
Journal ACNP code
2111037
Permalink
http://acnpsearch.tweb-dev.unibo.it/journal/2111037
Full Text
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